Product Profile

Model Name ： SVCR3260

Environment ： Vacuum (Temp. 15°C to 50°C)/Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)

Arm ： Single arm

Operating Range ： 520mm (3rd joint center)

Vertical Stroke ： 20mm / 40mm

Payload Capacity ： 2kg (calculated for the arm 3rd joint)

List of Product Model

Product Model           Vertical Stroke

SVCR3260-020-PM     20mm

SVCR3260-040-PM     40mm

Characteristics

Designed for handling wafers in the vacuum chamber of production line and inspection line

Double payload and superior cost performance compared to SVHR series

Compatible with SVHR series and it is possible to replace or upgrade into SVCR series

Magnetic fluid sealing is used for arm joint

Vacuum sealing: Magnetic fluid sealing and bellows are used

For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm

Motion monitoring is available

RS232C and parallel photo I/O are standard for control

2-phase stepping motor installed in all axes

Servo motor type is available

High-speed, high-accuracy wafer handlingby S-curved speed control

Wafer holding: end-effector with passive edge or edge grip type End-effector

End-effector material: CFRP, Al, ceramic, or others

Optimal end-effector is selectable according to the carrying object and line layout

For more information, Please contact us.